Lift-out probe having an extension tip, methods of making and using, and analytical instruments employing same
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United States of America Patent
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Mar 7, 2006
Grant Date -
Nov 10, 2005
app pub date -
May 4, 2004
filing date -
May 4, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Extension tips for lift-out probes used in conjunction with focused ion beam (FIB) systems and analytical instruments employing such probes are disclosed. Methods of forming the extension tips from a variety of materials such as a silicon wafer, preformed whiskers of conductive material, and metal lines or contacts removed from integrated circuits are also disclosed. Methods of using a variety of extension tips pre-placed within the FIB system to enable reconditioning worn or damaged lift-out probes are also disclosed.
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