Probing method and probing apparatus
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United States of America Patent
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Mar 7, 2006
Issued Date -
N/A
app pub date -
Jun 18, 2004
filing date -
Oct 6, 1999
priority date (Note) -
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status (Latency Note)
Importance
Abstract
Disclosed is a probing method comprising steps of moving a main chuck to align an object of inspection on the main chuck with probes of a probe card located over the main chuck, moving the main chuck toward the probe card, thereby bringing electrodes of the object of inspection into contact with the probes, overdriving the main chuck toward the probe card while measuring a load applied to the object of inspection by contact with the probes and controlling the movement of the main chuck in accordance with the measured load, and inspecting the electrical properties of the object of inspection by means of the probes.
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