Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
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United States of America Patent
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Mar 7, 2006
Issued Date -
N/A
app pub date -
Mar 24, 2005
filing date -
Jun 19, 1995
priority date (Note) -
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Abstract
A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.
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