Method of fabrication of thin film resistor with 0 TCR
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United States of America Patent
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Mar 14, 2006
Grant Date -
Dec 2, 2004
app pub date -
Jun 2, 2003
filing date -
Jun 2, 2003
priority date (Note) -
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Abstract
A thin film resistor that has a substantially zero TCR is provided as well as a method for fabricating the same. The thin film resistor includes at least two resistor materials located over one another. Each resistor material has a different temperature coefficient of resistivity such that the effective temperature coefficient of resistivity of the thin film resistor is substantially 0 ppm/° C. The thin film resistor may be integrated into a interconnect structure or it may be integrated with a metal-insulator-metal capacitor (MIMCAP).
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