Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
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United States of America Patent
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Mar 14, 2006
Issued Date -
N/A
app pub date -
Dec 1, 2004
filing date -
Jun 19, 1995
priority date (Note) -
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Abstract
A spatial light modulator including first and second substrate, and an array of deflectable elements disposed within a gap between the first and second substrates is disclosed herein. For electrostatically actuating the deflectable elements, an array of electrodes and circuitry is provided and positioned proximate to the deflectable elements.
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