Pressure sensor
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United States of America Patent
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-
Mar 21, 2006
Grant Date -
Sep 30, 2004
app pub date -
Jul 31, 2002
filing date -
Aug 1, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A differential pressure sensor chip (4) comprises a diaphragm for measuring a differential pressure and converts a pressure received by the diaphragm for measuring the differential pressure into an electrical signal. A static pressure sensor chip (5) comprises a diaphragm for measuring a static pressure and converts a pressure received by the diaphragm for measuring the static pressure into an electrical signal. The differential pressure sensor chip (4) and static pressure sensor chip (5) are mounted on a header (1) so that one surface of the differential pressure sensor chip (4) and one surface of the static pressure sensor chip (5) are exposed to the interior of a common pressure introducing chamber (17).
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