Radio frequency Langmuir probe
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United States of America Patent
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Mar 21, 2006
Issued Date -
N/A
app pub date -
Apr 30, 2004
filing date -
Aug 12, 2003
priority date (Note) -
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Abstract
A Langmuir probe for measuring characteristics of a plasma driven by radio frequency (RF) power comprises an elongated conductor 10 having an exposed tip 1 for insertion into an RF plasma and an outer end 3 for connection to external measuring circuitry. In order to reduce distortion over a range of RF frequencies, the probe includes an RF voltage divider 11, 12, 13, 14 in series between the tip and outer end of the conductor.
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