Lithographic apparatus and device manufacturing method
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United States of America Patent
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Mar 21, 2006
Grant Date -
Sep 1, 2005
app pub date -
Feb 27, 2004
filing date -
Feb 27, 2004
priority date (Note) -
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Abstract
A diffractive optical MEMS device includes a plurality of parallel planar reflective surfaces and an actuator system. The actuator system is used to adjust the position of each of the planar reflectors in a direction perpendicular to the planar reflectors to change characteristics (e.g., phase, intensity, etc.) of light interacting with the device.
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