Extended surface parallel coating inspection method
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United States of America Patent
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Mar 21, 2006
Grant Date -
Apr 21, 2005
app pub date -
Oct 20, 2003
filing date -
Oct 20, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Techniques for rapidly characterizing reflective surfaces and especially multi-layer EUV reflective surfaces of optical components involve illuminating the entire reflective surface instantaneously and detecting the image far field. The technique provides a mapping of points on the reflective surface to corresponding points on a detector, e.g., CCD. This obviates the need to scan a probe over the entire surface of the optical component. The reflective surface can be flat, convex, or concave.
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