System and method for sensing pressure
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United States of America Patent
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Mar 28, 2006
Grant Date -
N/A
app pub date -
Dec 15, 2004
filing date -
Dec 15, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A differential pressure sensor for use in an industrial application is described. The differential pressure sensor includes a membrane layer having a covered portion and an exposed portion where a first side of the exposed portion of the membrane layer is in fluid communication to a first aperture and a second side of the exposed portion is in fluid communication to a second aperture. The differential pressure sensor also includes at least one resonating device secured to the covered portion of the membrane layer and configured to oscillate at a desired frequency and a sensing circuitry configured to a detect oscillation in the at least one resonating device indicative of deformation in the membrane layer.
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