Protection of work piece during surface processing
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United States of America Patent
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Mar 28, 2006
Grant Date -
Nov 13, 2003
app pub date -
Apr 8, 2003
filing date -
Apr 9, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention provides an apparatus and method for protecting a work piece during surface processing. The apparatus employs a protective material to protect a wafer during backside grinding. The apparatus can further include a vacuum chuck that allows the passage of a vacuum signal, a frame holding the protective material, a frame holder to hold the frame, and a fastening arrangement to fasten the frame holder to the chuck adjacent a support surface. The method provided by the invention can include providing a vacuum chuck, placing a protective material in contact with the chuck, placing a wafer in contact with the protective material, applying a vacuum signal securing the wafer with the chuck, and grinding the backside surface of the wafer.
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