Micro-mirror with rotor structure

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United States of America Patent

PATENT NO 7019876
APP PUB NO 20040017599A1
SERIAL NO

10208590

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A micro-mirror device includes a stator structure having a set of radial stator electrodes, a rotor structure having a set of radial rotor electrodes, a mirror mounted on the rotor structure, and a flexure structure suspending the rotor structure relative to the stator structure.

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Patent Owner(s)

  • HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yang, Xiaofeng Corvallis, OR 85 559

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