Micromirrors and hinge structures for micromirror arrays in projection displays

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United States of America Patent

PATENT NO 7019880
APP PUB NO 20060050353A1
SERIAL NO

10927562

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Abstract

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The micromirror of the present invention comprises a mirror plate having thereon a cavity allowing deformation of a hinge attached to the mirror plate and deflection of the mirror plate in operation.

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATED12500 TI BOULEVARD MS 3999 DALLAS TX 75243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huibers, Andrew Palo Alto, CA 69 2174
Patel, Satyadev Sunnyvale, CA 43 670

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