Optical probe for wafer testing

United States of America Patent

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Mar 28, 2006
Grant Date
Jul 3, 2003
app pub date
Dec 28, 2001
filing date
Dec 28, 2001

priority date (Note)
Expired

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Abstract

A first optical probe is used to test a planar lightwave circuit. In one embodiment, a second probe is used in combination with the first probe to test the planar lightwave circuit by sending and receiving a light beam through the planar lightwave circuit.

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Patent Owner(s)

INTEL CORPORATION

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G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Johannessen, Kjetil	Trondheim, NO	19	230

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Optical probe for wafer testing

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10040398

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PATENT NO	7020363
APP PUB NO	20030123793A1
SERIAL NO	10040398
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 28, 2006	US,7020363,B2 US7020363B2	GRANTED PATENT AS SECOND PUBLICATION
July 03, 2003	US,20030123793,A1 US20030123793A1	FIRST PUBLISHED PATENT APPLICATION

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10040398

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