Intelligent modelling of process and tool health
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United States of America Patent
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Mar 28, 2006
Issued Date -
N/A
app pub date -
Mar 15, 2004
filing date -
Mar 13, 2003
priority date (Note) -
Expired
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Abstract
The health of a tool is predicted based on temporally ordered input data representing parameters indicative of tool health. A sliding time window is used to partition input data into temporally displaced data sets. Non-linear regression models determine, based on the data sets, a set of predictive values relating to tool health at a future time. A tool-health metric is then determined based on one or more of the predictive values.
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