Apparatus and method for a scanning probe microscope
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United States of America Patent
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Apr 4, 2006
Grant Date -
Mar 24, 2005
app pub date -
Sep 24, 2002
filing date -
Sep 24, 2001
priority date (Note) -
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Abstract
The invention relates to an apparatus and a method for a scanning probe microscope, comprising a measuring assembly which includes a lateral shifting unit to displace a probe in a plane, a vertical shifting unit to displace the probe in a direction perpendicular to the plane, and a specimen support to receive a specimen. A condenser light path is formed through the measuring assembly so that the specimen support is located in the area of an end of the condenser light path.
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