Capacitive resonators and methods of fabrication
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United States of America Patent
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Apr 4, 2006
Grant Date -
Apr 8, 2004
app pub date -
Jul 31, 2003
filing date -
Aug 7, 2002
priority date (Note) -
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Abstract
A micro-electro-mechanical system (MEMS) capacitive resonator and methods for manufacturing the same are invented and disclosed. In one embodiment, a method comprises forming trenches in a substrate, conformally coating the substrate with an oxide, filling the coated trenches with polysilicon, patterning the polysilicon, releasing a resonating structure derived from the substrate, and removing the conformally coated oxide.
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