Micro-mirror device including dielectrophoretic microemulsion

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United States of America Patent

PATENT NO 7023603
SERIAL NO

10744832

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Abstract

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A micro-mirror device includes a substrate having a surface, and a plate spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity therebetween. A dielectrophoretic microemulsion capable of movement when an electrical signal is applied to the micro-mirror device is disposed in the cavity, and a reflective element is interposed between the surface of the substrate and the plate such that the reflective element is adapted to move between a first position and at least one second position. The dielectrophoretic microemulsion has a continuous oil phase.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMTED8 LI-HSIN 6 ROAD HSINCHU SCIENCE PARK HSINCHU 300-77

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Reboa, Paul F Corvallis, OR 17 298

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