Adaptive real time control of a reticle/mask system
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United States of America Patent
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Apr 11, 2006
Grant Date -
Aug 4, 2005
app pub date -
Jan 30, 2004
filing date -
Jan 30, 2004
priority date (Note) -
Expired
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Abstract
An adaptive real time thermal processing system is presented that includes a multivariable controller. Generally, the method includes creating a dynamic model of the thermal processing system; incorporating reticle/mask curvature in the dynamic model; coupling a diffusion-amplification model into the dynamic thermal model; creating a multivariable controller; parameterizing the nominal setpoints into a vector of intelligent setpoints; creating a process sensitivity matrix; creating intelligent setpoints using an efficient optimization method and process data; and establishing recipes that select appropriate models and setpoints during run-time.
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