Electric heater for a semiconductor processing apparatus
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United States of America Patent
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Apr 11, 2006
Issued Date -
N/A
app pub date -
Nov 25, 2002
filing date -
Nov 25, 2002
priority date (Note) -
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status (Latency Note)
Importance
Abstract
An electric heater has multiple zones, wherein the multiple zones include at least one zone which is subject to high loading (e.g. bottom zone) and, at least one zone is a non-metal heating element, and the rest of the zones (e.g. middle zone and top zone) are metal resistance heating elements of light gauge overbent.
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