Pump controller for precision pumping apparatus

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United States of America Patent

PATENT NO 7029238
SERIAL NO

09447504

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparatus are adjusted to avoid these problems.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD RD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
McLoughlin, Robert F Pelham, NH 34 1762
Zagars, Raymond A Mildford, MA 4 196

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