Power semiconductor component in the planar technique

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United States of America Patent

PATENT NO 7030426
SERIAL NO

11079440

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Abstract

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In a power semiconductor component produced in a planar technique, a near-surface structure having at least one depression is formed in a surface region of an edge termination adjacent a main surface of the semiconductor body. The structure lies inside a space charge region formed when a voltage is applied at a junction between semiconductor regions of opposite conduction type. Dielectric material may fill the depression and form a passivation layer on the surface region. The depression may be an annular trench having a width to depth ratio ≦1. Alternatively, the structure may be waffle-shaped with multiple depressions.

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Patent Owner(s)

Patent OwnerAddress
IXYS SEMICONDUCTOR GMBHD-68623 LAMPERTHEIM

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Neidig, Arno Plankstadt, DE 18 435

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