High speed MEMS device
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United States of America Patent
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Apr 25, 2006
Grant Date -
N/A
app pub date -
May 13, 2002
filing date -
Dec 3, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An interferometric micro electro-mechanical switching (MEMS) device includes an interferometer. The interferometer includes an optical cavity having a depth and formed between an inner mirror assembly and an outer mirror assembly. The MEMS device further includes an actuator coupled to the interferometer. The actuator includes an electrode gap having a depth and formed between an inner conductor and an outer conductor. In one particular embodiment, the depth of the optical cavity and the depth of the electrode gap are capable of being selected substantially independently of one another.
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