Anodic oxidation method and treatment apparatus thereof
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United States of America Patent
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May 2, 2006
Grant Date -
Oct 21, 2004
app pub date -
May 24, 2002
filing date -
Dec 20, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to an anodic oxidation method and a treatment apparatus thereof which is suitable, for example, for generation of an oxide film and electropolishing of aluminum, capable of generating an oxide film at a low cost and rapidly by eliminating the use of electrolytic solution having a strong acid property and using a carbonated water as the electrolytic solution, capable of improving the oxide film generating operation and rationalizing the water discharging treatment, capable of preventing increase in temperature of the electrolytic solution without a need of a special equipment, capable of generating an oxide film in a stable manner and obtaining a good oxide film by eliminating the generation of oxide in the vicinity of an object to be treated, and capable of rationalization of the oxide film generating treatment and enhancing the productivity by using supercritical carbon dioxide. An object (3) to be treated is electrolyzed as an anode in an electrolytic solution. An oxide film is generated on the surface of the object (3). A pressurized carbon dioxide is dissolved in a predetermined quantity of water (7). An oxide film is generated by serving a carbonated water of a predetermined acid concentration as an electrolytic solution.
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