Rolling process cover
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United States of America Patent
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-
May 16, 2006
Grant Date -
Aug 19, 2004
app pub date -
Jan 13, 2004
filing date -
Jan 13, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A cover for the opening of a process tube of a furnace used in semiconductor manufacturing is comprised of a substantially continuous sheet of metal so that it may be rolled opened and closed while being against the opening of the process tube by a guide frame. The roller on which the cover is rolled is driven by a bidirectional DC motor. The process tube cover can be operated by a computer or controller that operates the furnace.
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