Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same
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United States of America Patent
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May 16, 2006
Grant Date -
Jul 21, 2005
app pub date -
Mar 31, 2004
filing date -
Sep 30, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method for cleaning and drying a front and a back surface of a substrate is provided. The method includes brush scrubbing the back surface of the substrate using a brush scrubbing fluid chemistry. The method further includes applying a front meniscus onto the front surface of the substrate upon completing the brush scrubbing of the back surface. The front meniscus includes a front cleaning chemistry that is chemically compatible with the brush scrubbing fluid chemistry.
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Cited Art Landscape
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