Method of producing an electrode configuration and method of electrically contacting the electrode configuration
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United States of America Patent
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May 16, 2006
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N/A
app pub date -
Aug 24, 2000
filing date -
Jul 3, 1997
priority date (Note) -
Expired
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Abstract
The electrode configuration includes at least one structured layer. A mask is produced on the layer to be structured and the layer is dry etched. The mask is at least slightly etchable by dry etching. The mask contains a metal silicide, a metal nitride or a metal oxide.
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