Stacked lens structure and method of use thereof for preventing electrical breakdown
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United States of America Patent
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May 16, 2006
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N/A
app pub date -
May 10, 2005
filing date -
Jun 18, 2004
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Abstract
A micro-electrical system, such as a lens stack for use in a scanning electron microscope, analysis tool, etc., comprises recesses and/or serrations that increase the surface path breakdown, thereby increasing reliability and enabling high voltage operations.
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