MEM micro-structures and methods of making the same
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United States of America Patent
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May 16, 2006
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app pub date -
Feb 28, 2003
filing date -
Feb 28, 2003
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Abstract
A device comprising an array of free metal ribbons that are coupled to a substrate through ceramic support structures is disclosed. The device is preferably an optical MEM device, wherein a first set of free metal ribbons are configured to move relative to a second set of alternating free metal ribbons for modulating an incident light source. An optical MEM system in accordance with the invention includes a light source and suitable optics for transmitting light to and from the array of free metal ribbons. The optical MEM device exhibits reduced surface charging and has applications in optical communications.
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