Reflection-type light modulating array element and exposure apparatus
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United States of America Patent
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May 16, 2006
Grant Date -
May 12, 2005
app pub date -
Oct 15, 2004
filing date -
Oct 16, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A reflection-type light modulating array element has: a substrate; a movable member provided with a beam body provided on the substrate through a first gap, a light reflector capable of rotational displacement by twisting of the beam body, and an electrically conducting part formed at least in a partial portion of the movable member; a lower electrode provided on a substrate side to face the movable member through the first gap, and an upper electrode provided on a side opposite to the lower electrode to face the movable member through a second gap, and thereby the movable member is between the lower electrode and the upper electrode, wherein a voltage is applied to the upper electrode, the lower electrode and the electrically conducting part to cause an rocking displacement of the light reflector and thereby deflect a reflection direction of a light.
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