Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 16, 2006
Issued Date -
N/A
app pub date -
Oct 22, 2003
filing date -
Feb 27, 2002
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A sample processing apparatus having a main unit for processing a sample, a recorder for recording information of an operation in the main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on the main unit, and a display unit for displaying each of the data corresponding to outputs of the sensors simultaneously.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully