Alignment of semiconductor wafers and other articles

United States of America Patent

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May 30, 2006
Grant Date
Jan 6, 2005
app pub date
Jun 9, 2004
filing date
Jul 13, 2001

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Expired

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Abstract

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A wafer or some other article is aligned while being held by an end-effector.

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Patent Owner	Address
TRU-SI TECHNOLOGIES INC	SUNNYVALE CA

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B65G:TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR L....

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Inventor Name	Address	# of filed Patents	Total Citations
Berger, Alexander J	Palo Alto, CA	15	204
Kretz, Frank E	Santa Clara, CA	11	147

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Alignment of semiconductor wafers and other articles

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10865328

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PATENT NO	7052229
APP PUB NO	20050004701A1
SERIAL NO	10865328
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 30, 2006	US,7052229,B2 US7052229B2	GRANTED PATENT AS SECOND PUBLICATION
January 06, 2005	US,20050004701,A1 US20050004701A1	FIRST PUBLISHED PATENT APPLICATION

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10865328

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