Shielded probe for testing a device under test
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United States of America Patent
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Jun 6, 2006
Grant Date -
May 12, 2005
app pub date -
May 23, 2003
filing date -
May 23, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe measurement system preferably includes a probe having a conductive path between the first and second sides of a substrate and a probe contact electrically connected to the conductive path.
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