Common optical-path testing of high-numerical-aperture wavefronts

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United States of America Patent

PATENT NO 7057737
APP PUB NO 20050046863A1
SERIAL NO

10652903

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Abstract

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A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.

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Patent Owner(s)

Patent OwnerAddress
ONTO INNOVATION INC16 JONSPIN ROAD WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brock, Neal J Tucson, AZ 7 306
Hayes, John B Tucson, AZ 18 673
Millerd, James E Tucson, AZ 14 434
Wyant, James C Tucson, AZ 8 320

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