Micromirror for MEMS device

United States of America Patent

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Jun 6, 2006
Grant Date
Nov 24, 2005
app pub date
May 19, 2004
filing date
May 19, 2004

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Abstract

A micromirror which includes a substrate, a reflective layer comprising pure aluminum overlying the substrate and a protective layer comprising titanium nitride overlying the reflective layer is disclosed.

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Patent Owner(s)

Patent Owner	Address
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD	HSINCHU CHINA TAIWAN HSINCHU SCIENCE PARK INDUSTRIAL FORCE LINE SIX EIGHT HSINCHU CITY TAIWAN PROVINCE

International Classification(s)

G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Chang, Yuh-Hwa	Shulin, TW	15	198
Chen, Chia-Chiang	Hsinchu, TW	4	11
Chen, Fei-Yuh	Hinchu, TW	14	67
Ho, David	Taichung, TW	123	1416
Wang, Shen-Ping	Keelung, TW	31	108

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Micromirror for MEMS device

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United States of America Patent

10849672

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PATENT NO	7057794
APP PUB NO	20050259311A1
SERIAL NO	10849672
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 06, 2006	US,7057794,B2 US7057794B2	GRANTED PATENT AS SECOND PUBLICATION
November 24, 2005	US,20050259311,A1 US20050259311A1	FIRST PUBLISHED PATENT APPLICATION

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10849672

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