Ferroelectric capacitor
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United States of America Patent
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Jun 6, 2006
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app pub date -
Dec 16, 2004
filing date -
Jul 7, 1995
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Abstract
A ferroelectric capacitor including a lower electrode, a ferroelectric layer and an upper electrode. A part of at least any one of the lower and upper electrodes is formed of a material selected from the group consisting of TiOx, TaOx, ReOx, WOx, IrO.sub.2, PtO.sub.2, RuOx, PdOx, and OsOx.
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