Method of orientating a template with respect to a substrate in response to a force exerted on the template
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United States of America Patent
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Jun 13, 2006
Grant Date -
Sep 2, 2004
app pub date -
Feb 27, 2004
filing date -
Oct 29, 1999
priority date (Note) -
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Abstract
The present invention includes a method of orientating a template with respect to a substrate spaced from the template, the method including, rotating the template about a first and a second axis to orientate the template with respect to the substrate and maintain the orientation in response to a force being exerted upon the template.
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