US Patent No: 7,060,422

Number of patents in Portfolio can not be more than 2000

Method of supercritical processing of a workpiece

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ALSO PUBLISHED AS: 20030136514
ATTORNEY / AGENT: (SPONSORED)
 

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Abstract

An apparatus for supercritical processing and non-supercritical processing of a workpiece comprises a transfer module, a supercritical processing module, a non-supercritical processing module, and a robot. The transfer module includes an entrance. The supercritical processing module and the non-supercritical processing module are coupled to the transfer module. The robot is preferably located within the transfer module. In operation, the robot transfers a workpiece from the entrance of the transfer module to the supercritical processing module. After supercritical processing, the robot then transfers workpiece from the supercritical processing module to the non-supercritical processing module. After the non-supercritical processing, the robot returns the workpiece to the entrance of the transfer module. Alternatively, the non-supercritical processing is performed before the supercritical processing.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
TOKYO ELECTRON LIMITEDTOKYO5116

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Biberger, Maximilian Albert Palo Alto, CA 6 53
Layman, Frederick Paul Fremont, CA 8 79
Sutton, Thomas Robert San Jose, CA 7 76

Cited Art

Patent Info (Count) # Cites Year
 
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4,778,356 Diaphragm pump 66 1986
5,011,542 Method and apparatus for treating objects in a closed vessel with a solvent 60 1989
5,213,619 Processes for cleaning, sterilizing, and implanting materials using high energy dense fluids 76 1989
5,368,171 Dense fluid microwave centrifuge 66 1992
5,514,220 Pressure pulse cleaning 50 1992
6,239,038 Method for chemical processing semiconductor wafers 77 1996
5,900,354 Method for optical inspection and lithography 314 1997
5,975,492 Bellows driver slot valve 54 1997
6,053,348 Pivotable and sealable cap assembly for opening in a large container 38 1997
6,564,826 Flow regulator for water pump 31 2001
6,561,481 Fluid flow control apparatus for controlling and delivering fluid at a continuously variable flow rate 34 2001
6,521,466 Apparatus and method for semiconductor wafer test yield enhancement 42 2002

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
APPLIED MATERIALS, INC. (2)
7,784,164 Electronic device manufacturing chamber method 0 2005
8,033,772 Transfer chamber for vacuum processing system 0 2006
 
MICRON TECHNOLOGY, INC. (1)
7,323,064 Supercritical fluid technology for cleaning processing chambers and systems 0 2003
 
SAMSUNG ELECTRONICS CO., LTD. (1)
7,431,855 Apparatus and method for removing photoresist from a substrate 1 2003
 
SEMES CO., LTD. (1)
7,866,058 Spin head and substrate treating method using the same 3 2007

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