Fabry-Perot interferometer
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United States of America Patent
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Jun 13, 2006
Grant Date -
Sep 8, 2005
app pub date -
Mar 2, 2004
filing date -
Mar 2, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of tuning a resonant cavity of an FP (Fabry-Perot) interferometer in a DLD (diffractive light device) MEMS (microelectromechanical system) device, wherein the FP interferometer has a top plate and a bottom plate, and wherein the method comprises; using first and second electromechanical transducers to independently change a distance between the top and bottom plates of the FP interferometer.
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