Electrostatic levitation furnance
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United States of America Patent
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Jun 13, 2006
Grant Date -
Feb 3, 2005
app pub date -
Sep 27, 2002
filing date -
Sep 28, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electrostatic levitation furnace is improved by providing three pairs of electrodes opposed to each other respectively on three axes perpendicularly intercepting each other at a position where the sample is to be levitated in the vacuum chamber, and disposing a plurality of access ports, which are directed to the position of the sample, to the vacuum chamber tree-dimensionally, whereby the accessible direction against the sample is diversified, it becomes possible to improve the degree of freedom in distribution of various apparatuses and easily cope with increase of apparatuses.
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