Method for process control of semiconductor manufacturing equipment
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United States of America Patent
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Jun 13, 2006
Grant Date -
Dec 16, 2004
app pub date -
Mar 2, 2004
filing date -
Jun 11, 2003
priority date (Note) -
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Abstract
A method of fault identification on a semiconductor manufacturing tool includes monitoring tool sensor output, establishing a fingerprint of tool states based on the plurality of sensors outputs, capturing sensor data indicative of fault conditions, building a library of such fault fingerprints, comparing present tool fingerprint with fault fingerprints to identify a fault condition and estimating the effect of such a fault condition on process output. The fault library is constructed by inducing faults in a systematic way or by adding fingerprints of known faults after they occur.
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