Apparatus and method for processing wafers

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7064809
APP PUB NO 20050168715A1
SERIAL NO

11045481

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for processing semiconductor wafers includes: a wafer support with a first positioning system that can rotate the wafer support coaxially with a wafer; at least one processing apparatus, which can be moved with a second positioning system such that a processing tool proceeding from the processing apparatus can be guided radially over the wafer; and at least one position determining apparatus for determining a wafer position on the basis of features of the wafer. Alignment marks of the wafer are found and points to be processed, such as laser fuses, are moved by rotation of the wafer and movement of at least one processing apparatus in the radial direction above the wafer.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
POLARIS INNOVATIONS LIMITEDDUBLIN, IE3055

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kemper, Franz Pocking, DE 3 12
Mockel, Jens Munchen, DE 5 12

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (1)
* 5558110 Apparatus for removing particulate matter 20 1994
 
NIKON CORPORATION (1)
* 5623473 Method and apparatus for manufacturing a diffraction grating zone plate 10 1995
 
CHENG, DAVID (1)
5479108 Method and apparatus for handling wafers 158 1992
 
Siemens Nixdorf Informationssyteme Aktiengesellschaft (1)
4792658 Device for soldering electronic structural elements of a circuit plate bar 10 1986
 
SONY CORPORATION (1)
* 6592435 Method of and apparatus for manufacturing recording medium 9 2001
 
Sony Precision Technology Inc. (1)
* 6541747 Focal mechanism and method for controlling focal point position, and apparatus and method for inspecting semiconductor wafer 18 2000
 
U.S. PHILIPS CORPORATION (1)
5029243 Device for working a workpiece using laser light 23 1989
 
CHEMTRON RESEARCH LLC (1)
* 6442312 Optical filter fabrication method and apparatus, optical filter, fiber holder with spiral groove, and phase mask 7 2000
 
OKI ELECTRIC INDUSTRY CO., LTD. (1)
* 6307617 Initial alignment system for use in manufacturing an optical filter 9 1999
 
CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (1)
* 6009888 Photoresist and polymer removal by UV laser aqueous oxidant 23 1998
 
NXP USA, INC. (1)
5982166 Method for measuring a characteristic of a semiconductor wafer using cylindrical control 108 1997
 
TOKYO ELECTRON LIMITED (1)
* 6496245 Developing method and developing apparatus 15 2001
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
ELECTRO SCIENTIFIC INDUSTRIES, INC. (3)
* 7315038 Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as an alignment target 4 2005
* 7297972 Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target 6 2006
7964819 Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target 5 2007
* Cited By Examiner

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