Method to improve the control of electro-polishing by use of a plating electrode an electrolyte bath
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United States of America Patent
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Jun 27, 2006
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app pub date -
Aug 8, 2003
filing date -
Aug 8, 2003
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Abstract
A method and apparatus which uses a plating electrode in an electrolyte bath. The plating electrode works to purify an electrolyte polishing solution during the electro-polishing process. Preferably, the plating electrode is employed in a closed loop feedback system. The plating electrode may be powered by a power supply which is controlled by a controller. A sensor may be connected to the controller and the sensor may be configured to sense a characteristic (for example, but not limited to: resistance, conductance or optical transmission, absorption of light, etc.) of the electrolyte bath, which tends to indicate the level of saturation. Preferably, the plating electrode is easily replaceable.
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