Method and apparatus for a reflective spatial light modulator with a flexible pedestal
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United States of America Patent
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Jun 27, 2006
Grant Date -
Feb 2, 2006
app pub date -
Jul 28, 2004
filing date -
Jul 28, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
An electro-mechanical system comprising a substrate including a surface region and a flexible member coupled at a first end to the surface region. The system further comprises a base region within a first portion of the flexible member and a tip region within a second portion of the flexible member. The system also comprises a reflective member coupled to the flexible member, including a reflective surface and a backside region, the backside region being coupled to the second end of the flexible member, the reflective surface being substantially parallel to the surface region while the reflective member is in a first state and being substantially non-parallel to the surface region while the reflective member is in a second state, whereupon the flexible member moves from a first position characterized by the first state to a second position characterized by the second state.
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