Method for manufacturing a liquid ejecting head

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United States of America Patent

PATENT NO 7069631
SERIAL NO

11240524

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Abstract

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A piezoelectric structure includes a vibrational plate and a piezoelectric film. The vibrational plate includes a layer of a monocrystal material, a polycrystal material, a monocrystal material doped with an element which is different from an element constituting the monocrystal material, or a polycrystal material doped with an element which is different from an element constituting the polycrystal materials. Oxide layers sandwich the aforementioned layer. The piezoelectric film has a single orientation crystal or monocrystal structure.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHAJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukui, Tetsuro Kanagawa-ken, JP 89 1040
Matsuda, Takanori Kanagawa-ken, JP 98 805
Unno, Akira Kanagawa-ken, JP 28 284
Wasa, Kiyotaka Nara-ken, JP 32 423
Yonehara, Takao Kanagawa-ken, JP 214 10708

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