Inertial sensor
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United States of America Patent
Stats
-
Jul 4, 2006
Grant Date -
Jan 12, 2006
app pub date -
Mar 31, 2005
filing date -
Jul 12, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An inertial sensor such as an acceleration sensor or gyro can have superior impact resistance by regulating displacement of a weight portion in the direction of an upper limit. The sensor includes a sensor portion that has a fixing part, a weight portion the height of which is a predetermined size shorter than that of the fixing part, and a beam portion that links the weight portion and the fixing part; a plate-like first stopper portion that covers the weight portion and is bonded to the fixing part with clearance of a predetermined size from the weight portion; and a flat, plate-like second stopper portion that is connected to the fixing part via a bump of a predetermined height on the side opposite the first stopper portion.
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