Vertical proximity processor

United States of America Patent

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Jul 4, 2006
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app pub date
Mar 31, 2003
filing date
Sep 30, 2002

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Abstract

A method for processing a substrate is provided which includes generating a fluid meniscus on the surface of the vertically oriented substrate, and moving the fluid meniscus over the surface of the vertically oriented substrate to process the surface of the substrate.

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Patent Owner(s)

Patent Owner	Address
LAM RESEARCH CORPORATION	4650 CUSHING PARKWAY OAKLAND CA 94538

International Classification(s)

B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
de, Larios John	Palo Alto, CA	22	227
Garcia, James P	Santa Clara, CA	24	459
Ravkin, Mike	Sunnyvale, CA	63	1167
Redeker, Fred C	Fremont, CA	195	5499
Woods, Carl	Aptos, CA	36	417

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Vertical proximity processor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10404270

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US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
July 04, 2006	US,7069937,B2 US7069937B2	GRANTED PATENT AS SECOND PUBLICATION
April 01, 2004	US,20040060581,A1 US20040060581A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7069937
SERIAL NO	10404270
DOCKET NO

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10404270

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