Monolithic printhead with built-in equipotential network and associated manufacturing method
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United States of America Patent
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Jul 4, 2006
Grant Date -
N/A
app pub date -
Nov 14, 2000
filing date -
Nov 15, 1999
priority date (Note) -
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Abstract
An actuating assembly (50) for ink jet printheads consists of a silicon die (61), which comprises a groove (45) and a lamina (64), and of a structure (75) produced monolithically in the same production process. The actuating assembly (50) comprises a microhydraulics (63), the latter in turn comprising a plurality of channels (67) and chambers (57), made inside the structure (75) by means of a sacrificial metallic layer (54). A conducting layer (26) forms a single interconnected equipotential network used as the electrode during the processes of electrochemical etch stopping on the groove (45), of electrodeposition of the sacrificial layer (54) and of the latter's subsequent removal.
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