Methods for fabricating spatial light modulators with hidden comb actuators
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United States of America Patent
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Jul 4, 2006
Issued Date -
N/A
app pub date -
Apr 6, 2005
filing date -
Mar 22, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Described are methods for fabricating Micro-Electro-Mechanical Systems (MEMS) actuators with hidden combs and hinges. The ability to hide the combs renders the actuators useful in digital micro-mirror devices. Comb actuators provide increased torque, which facilitates the use of stiffer, less fragile hinge structures. Also important, comb actuators do not require mechanical stops to define stable states, and thus avoid problems associated with physical contact. The actuators are infinitely variable through a range of angles.
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