Importance

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Abstract

Embodiments of an end effector assembly for a substrate robot are provided herein. In one embodiment, the end effector assembly includes a wrist and a first and a second end effector coupled to the wrist in a spaced apart relationship. The first end effector includes a base coupled to the wrist and a tip coupled to the base opposite the wrist. The base and the tip may be made of the same or different materials. The first and the second end effectors may have different resonant frequencies to minimize vibration. Optionally, a low emissivity coating may be provided on the first and second end effector. The low emissivity coating may further have a plurality of stress relief grooves to reduce or prevent flaking of the coating due to differences in rates of thermal expansion between the coating and the underlying end effector.

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First Claim